4 specifications – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
13.4.4 Specifications
Dimensions
1.58 in. diameter x 1.79 in.
(40.13 mm diameter x 45.47 mm)
Temperature Range
0 to 50
o
C
Frequency
760-601-G1: 5.5 MHz ± 30 ppm at room temperature
760-601-G2: 5.5 MHz ± 1 ppm at room temperature
Materials
304 Stainless Steel, Nylon, Teflon, brass. Some internal components contain zinc,
tin, and lead.
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