INFICON IC/5 Thin Film Deposition Controller - Manual (Page 73)

3 - 21
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
Figure 3-13 I/O Display
LOGIC STATEMENT DIRECTORY: Provides a display that facilitates selection
of Logic statements for editing. (See
Chapter 6 .)
I/O MAP DIRECTORY: Provides a display where relays, inputs, or outputs may
be assigned names and where the relay type may be designated as normally
open or normally closed. (See
section 6.6 on page 6-16 .)
DEFINE USER MESSAGES: Provides a display where user messages may be
assigned. (See
section 6.7 on page 6-17 .)
FLOPPY DISK: Saves or retrieves parameters to or from floppy disk or saves
Datalogging parameters to the floppy disk (See
section 3.6.8 on page 3-39 ).
REMOTE COMMUNICATIONS: Defines configuration for external computer
communications (See
Chapter 7 .)
F4 SOURCE/SENSOR DIRECTORY
Source/Sensor displays allow the user to set up the configuration for sources
and sensors connected to the IC/5. The information includes which source and
sensor shutter outputs are connected, how many crucibles a source has, and
whether a sensor is a single, dual or CrystalSix. (See
Chapter 8 .)
F5 UTILITY
Parameters on the UTILITY displays deal with overall system setup, including
how displays are formatted and general process choices (such as whether to
STOP on max power). (See
Chapter 9 .)