INFICON IC/5 Thin Film Deposition Controller - Manual (Page 232)

10 - 26
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
Statement 30 monitors the Deposition Pressure OK input, makes sure that the IC/5
is in the READY state, the high vacuum valve is open and the instrument is ready
for automatic process control. Once these conditions are met, the electron beam
gun filament is turned on by activating the Filament Interlock and Filament relays.
When Statement 30's conditions are met, Statement 42 cancels the “UNDER HIGH
VACUUM” message and displays the “PROCESS STARTED” message.
Figure 10-47 Statement 43
Statement 43 places the IC/5 into the STOP state if Statement 2 evaluates to be
true. Statement 2 is designed to detect if the system is not ready for automatic
process control or if something goes wrong during the process.