INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
QUICK BUMP #
Indicates the number of the AutoTune source power change used to measure
the system response characteristics.
RAMP 1 MORE THAN 2
Start Ramp 1 value must be less than Start Ramp 2 value.
RAMP 2 LESS THAN 1
Start Ramp 2 value must be greater than Start Ramp 1 value.
RATE ABOVE MAX
Indicates the deposition rate has increased beyond the maximum allowed
value in AutoTune.
REMOTE LOCK
Indicates the instrument is remote locked from an external computer. This
prohibits any parameters from being entered via the front panel.
RS232 TIMEOUT
Data in the instrument serial communications port buffer must be read by the
Host computer within a given amount of time. If this does not happen the
instrument will clear its communications buffer. This error message indicates
the Host computer has quit communicating with the instrument.
SAMPLE
Indicates the instrument is in the SAMPLE portion of RateWatcher.
SENSOR IN USE
An attempt is being made to turn on a sensor that is already in use for the
other of the co-deposited materials.
SET AS RECORDER OUT
The value you are attempting to enter has been previously defined as a
recorder output in either the Material Set-Up display or one of the Sensor
Set-Up displays.
SET AS SOURCE OUT
The value you are attempting to enter has been previously defined as a
Source DAC output in one of the Source Set-Up displays.
SLOW SYSTEM
Indicates that AutoTune determined the response of the system to be slow.
SPEED TEST
The system’s speed of response is being determined by AutoTune. The
source power increases by 5% during this period.
STOP - COMMUNICATIONS
STOP command received from remote communications.