INFICON IC/5 Thin Film Deposition Controller - Manual (Page 297)

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IC/5 Operating Manual
13.4.3 Sensor Cover Connection
The Crystal Sensor Emulator can be used to verify the measurement system for
INFICON's Thin Film Deposition Controllers and Monitors.
NOTE: The Crystal Sensor Emulator 760-601-G1 is not compatible for use with an
IC/5. Use 760-601-G2 for all thin film deposition controllers.
However, the Crystal Sensor Emulator's Sensor Cover Connector is compatible
with some sensor heads, and is incompatible with others. This is discussed in the
following sections.
13.4.3.1 Compatible Sensor Heads
The Sensor Cover Connection will fit the sensor heads shown in Table 13-4 .
13.4.3.2 Incompatible Sensor Heads
The Sensor Heads for which the Crystal Sensor Emulator's Sensor Cover
Connector will not fit are shown in
Table 13-5 .
NOTE: The Crystal Sensor Emulator’s Sensor Cover will not fit the crystal holder
opening of the older style INFICON transducers that have the "soldered"
finger springs.
Table 13-4 Compatible Sensor Heads
Sensor Head Part Number
Standard Sensor Head 750-211-G1
Standard Sensor Head with Shutter 750-211-G2
Compact Sensor Head 750-213-G1
Compact Sensor Head with Shutter 750-213-G2
Dual Sensor Head 750-212-G2
Table 13-5 Incompatible Sensor Heads
Sensor Head Part Number
UHV Bakeable Sensor Head (12 inch) 007-219
UHV Bakeable Sensor Head (20 inch) 007-220
UHV Bakeable Sensor Head (30 inch) 007-221
UHV Bakeable Sensor Head w/ Shutter (12 inch) 750-012-G1
UHV Bakeable Sensor Head w/ Shutter (20 inch) 750-012-G2
UHV Bakeable Sensor Head w/ Shutter (30 inch) 750-012-G3
Sputtering Sensor Head 750-618-G1
CrystalSix Sensor Head with position select 750-446-G1
CrystalSix Sensor Head 750-260-G1