INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Complete Bump 1. . . . . . . . . . . . . . The first increase of source power level. It is
used to determine control loop parameters
for the Complete Tune portion of AutoTune.
Complete Bump 2. . . . . . . . . . . . . . The second increase of source power level.
Complete Bump 3. . . . . . . . . . . . . . The third increase of source power level.
Complete Tune Failure . . . . . . . . . Indicates inconsistent results which do not
allow the Complete Tune control loop
parameters to be calculated. The Quick Tune
results are then displayed.
Fast System . . . . . . . . . . . . . . . . . . Indicates a very short time delay between an
increase in power level and the
corresponding rate increase.
Half Rate . . . . . . . . . . . . . . . . . . . . . The adjustment of the source's power level to
establish a deposition rate which is one-half
the desired rate.
Max Power Exceeded. . . . . . . . . . . Indicates the power level has exceeded the
AutoTune MAXIMUM POWER.
NOTE: The AutoTune max power is 5% less
than the max power programmed for
the material being AutoTuned.
Quick Bump 1 . . . . . . . . . . . . . . . . . The first 5% increase of source power level.
It is used to determine control loop
parameters for the Quick Tune portion of
AutoTune.
Quick Bump 2 . . . . . . . . . . . . . . . . . The second 5% increase of source power
level.
Quick Bump 3 . . . . . . . . . . . . . . . . . The third 5% increase of source power level.
Ramp . . . . . . . . . . . . . . . . . . . . . . . . Indicates the power level is being decreased
to zero over a thirty second time period.
Slow System . . . . . . . . . . . . . . . . . . Indicates that a measurable time delay
between an increase in power level and the
corresponding rate increase has been
measured.
Speed Test . . . . . . . . . . . . . . . . . . . An instantaneous increase of source power.
It is used to test the response time of the
system in order to differentiate between fast
and slow systems.