INFICON IC/5 Thin Film Deposition Controller User Manual

Ic/5, Thin film deposition controller

Table of contents

Document Outline

Cover Page
Title Page
Trademarks
Declaration Of Conformity
Warranty
Table Of Contents
Chapter 1 Introduction and Specifications
- 1.1 Introduction
  - 1.1.1 Related Manuals
- 1.2 Instrument Safety
- 1.3 How To Contact Customer Support
  - 1.3.1 Returning Your Instrument
- 1.4 IC/5 Specifications
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial PowerOn Verification
Chapter 2 Measurement and Control Theory
- 2.1 Basics
Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 Process Description
- 3.5 State Descriptions
- 3.6 Special Features
Chapter 4 Material Set Up
- 4.1 Material Set Up Overview
- 4.2 Material Definition
- 4.3 Material Definition Parameters
- 4.4 Error Messages in Material Set-Up
Chapter 5 Process Set-Up
- 5.1 Process Set-Up Overview
- 5.2 Process Definition
  - 5.2.1 Layer Editing
- 5.3 Layer Definition Parameters
- 5.4 Error Messages in Process Set-Up
- 5.5 Special Layer Parameter Features
  - 5.5.1 Skip Deposit
  - 5.5.2 Rate Ramp Trigger of Final Thickness
Chapter 6 I/O Logic Statement Set-Up
- 6.1 I/O Logic Statement Overview
- 6.2 Editing the Logic Statements
  - 6.2.1 Logic Statement Directory
  - 6.2.2 Logic Statement Editing
- 6.3 ’IF’ Event Definitions
- 6.4 ’THEN’ Action Definitions
- 6.5 Logic Statement Example
- 6.6 I/O Map Directory
- 6.7 Define User Messages
- 6.8 Floppy Disk
- 6.9 Error Messages in I/O Logic Statement Set-Up
Chapter 7 Remote Communications
- 7.1 Remote Communication Configuration Overview
- 7.2 Remote Communication Parameters
- 7.3 Error Messages in Remote Communications Configuration
- 7.4 Remote Communications Overview
- 7.5 Physical Connections
  - 7.5.1 RS-232C Serial Port
  - 7.5.2 IEEE488 Port
    - 7.5.2.1 IEEE Settings for a National Instruments IEEE-GPIB Board
- 7.6 Message Protocols
  - 7.6.1 INFICON Message Formats
- 7.7 INFICON Standard Communication Commands
- 7.8 Sample INFICON Messages and Host Programs
  - 7.8.1 Sample INFICON Messages
  - 7.8.2 Sample Host Programs
Chapter 8 Source/Sensor Set-Up
- 8.1 Source/Sensor Set-Up Overview
- 8.2 Source/Sensor Navigation
- 8.3 Source Parameters
- 8.4 Sensor Parameters
- 8.5 DAC Output Selection Rules
- 8.6 Error Messages in Source/Sensor Set-Up
Chapter 9 Utility Set-Up
- 9.1 Utility Set-Up Overview
- 9.2 Utility Navigation
- 9.3 Utility Parameters
- 9.4 Error Messages in Utility Set-Up
Chapter 10 Applications
- 10.1 Multiple Sensor Deposition Control
  - 10.1.1 Instrument Parameters and Corrections for Multiple Sensor Operation
- 10.2 Trend Analysis
  - 10.2.1 Instrument Parameters Associated with the Trend Analysis Feature
- 10.3 Use as a System Controller Example
  - 10.3.1 System Equipment List
  - 10.3.2 I/O SetUp
Chapter 11 Installation and Interfaces
- 11.1 Location Guidelines
- 11.2 Avoiding Electrical Interference
- 11.3 Connecting the Controller
Chapter 12 Calibration Procedures
- 12.1 Importance of Density, Tooling and Zratio
- 12.2 Determining Density
- 12.3 Determining Tooling
- 12.4 Laboratory Determination of Zratio
- 12.5 Determining Cross Talk Calibration For CoDeposition
- 12.6 AutoTuning
Chapter 13 Troubleshooting, Status and Error Messages
- 13.1 Status and Error Messages
- 13.2 Troubleshooting Guide
- 13.3 Replacing the Crystal
- 13.4 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
Appendix A Material Table
- A.1 Introduction
Index
- A
- C
- D
- E
- F
- H
- I
- L
- M
- O
  - Open Loop Method 2-12
- P
- Q
- R
- S
- T
- V
- W
  - windup 2-15
  - wire feed 4-12
- X
  - XIU cable 11-10
- Z
  - Z-match equation 2-5
  - Z-ratio 2-9, 3-14, 4-5, 12-1, 12-3