INFICON IC/5 Thin Film Deposition Controller - Manual (Page 222)

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IC/5 Operating Manual
Figure 10-8 Statement 3
Statement 3 monitors if Timer 1 is expired and if the Roughing Valve is closed.
Timer 4 is used as a delay between closing of the roughing valve and opening of
the foreline valve. (Timer 4 is set in Statement 20) This delay is used to prevent a
burst of pressure through the foreline. Statements 1, 2, and 3 are used to identify
the status of the vacuum system. Many of the remaining Logic Statements are
dependent on one of these three Statements.
Figure 10-9 Statement 4
This statement is used to ensure the High Vacuum Valve is closed whenever the
Foreline valve is closed. (When the system is set for automatic process control, i.e.
Timer 1 expired). It is detrimental to the vacuum system to have the high vacuum
valve open when the foreline valve is closed.
Figure 10-10 Statement 5
Statement 5 ensures the roughing valve is closed whenever the foreline valve is
open (when the system is set for automatic process control, i.e., Timer 1 expired).
It is detrimental to the vacuum system to have the roughing valve open when the
foreline valve is open.
Figure 10-11 Statement 6
Statement 6 prevents the process from proceeding if the Diffusion pump is not at
operating temperature or if Statement 2 is true. It will also prevent the Diffusion
pump from being dumped to atmosphere if the Vent Chamber input is activated
while the High Vacuum Valve is open. This Statement, in conjunction with
Statement 17, ensures the high vacuum valve is closed prior to opening the vent
valve.
Timers 5, and 6 are used as delays between opening the Foreline Valve and
opening the High Vacuum Valve. Timer 7 is the delay between opening the High
Vacuum Valve and turning on the Ion Gauge. By canceling timers 5, 6, and 7
automatic processing cannot proceed as Statements 12 and 13, which open the
high vacuum valve and turn on the Ion Gauge, are dependent on these timers.