INFICON IC/5 Thin Film Deposition Controller - Manual (Page 301)

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IC/5 Operating Manual
50 Co 8.900 0.343 Cobalt
51 CoO 6.440 0.412 Cobalt Oxide
52 Cr 7.200 0.305 Chromium
53 Cr
2
O
3
5.210 *1.000 Chromium (III) Oxide
54 Cr
3
C
2
6.680 *1.000 Chromium Carbide
55 CrB 6.170 *1.000 Chromium Boride
56 Cs 1.870 *1.000 Cesium
57 Cs
2
SO
4
4.243 1.212 Cesium Sulfate
58 CsBr 4.456 1.410 Cesium Bromide
59 CsCI 3.988 1.399 Cesium Chloride
60 CsI 4.516 1.542 Cesium Iodide
61 Cu 8.930 0.437 Copper
62 Cu
2
O 6.000 *1.000 Copper Oxide
63 Cu
2
S 5.600 0.690 Copper (I) Sulfide (Alpha)
64 Cu
2
S 5.800 0.670 Copper (I) Sulfide (Beta)
65 CuS 4.600 0.820 Copper (II) Sulfide
66 Dy 8.550 0.600 Dysprosium
67 DY
2
O
3
7.810 *1.000 Dysprosium Oxide
68 Er 9.050 0.740 Erbium
69 Er
2
O
3
8.640 *1.000 Erbium Oxide
70 Eu 5.260 *1.000 Europium
71 EuF
2
6.500 *1.000 Europium Fluoride
72 Fe 7.860 0.349 Iron
73 Fe
2
O
3
5.240 *1.000 Iron Oxide
74 FeO 5.700 *1.000 Iron Oxide
75 FeS 4.840 *1.000 Iron Sulphide
76 Ga 5.930 0.593 Gallium
77 Ga
2
O
3
5.880 *1.000 Gallium Oxide (B)
78 GaAs 5.310 1.590 Gallium Arsenide
79 GaN 6.100 *1.000 Gallium Nitride
80 GaP 4.100 *1.000 Gallium Phosphide
81 GaSb 5.600 *1.000 Gallium Antimonide
82 Gd 7.890 0.670 Gadolinium
Table A-1 Material Table (continued)
Code Formula Density Z-Ratio Material Name