INFICON IC/5 Thin Film Deposition Controller - Manual (Page 174)

7 - 32
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
12 RATE TOO LOW
13 QUICK TUNE FAIL
14 HALF RATE FAIL
15 COMPLETE TUNE
FAIL
16 MAX. POWER ERROR
17 COMMUNICATIONS
18 LOGIC STATEMENT
19 HAND HELD
20 NO SOURCE DAC
7 Sensor Status - Returns the sensor status for all
sensors.
The status format is shown below; separating each
sensor information field is the CR character (ASCII
13).
Sensor # GOOD A
Sensor is good and actively in use for a current film.
Sensor # FAIL A
Sensor has failed and the current film needs to use
this sensor.
Sensor # GOOD N
Sensor is good and turned off for the current film.
Sensor # FAIL N
Sensor has failed and turned off for the current film.
8 Layers in current process. The value returned
indicates the number of layers in the current
process.
þþ
x to xxx
9 End of Process. The value returned indicates
whether the IC/5 has reached the end of a process.
A value of 1 indicates the end of process has been
reached. A value of 0 indicates the end of process
has not been reached. x
10 Process Layer Information. This command returns a
variable length string in the format NNxxx...xxx. The
value NN indicates the number of defined
processes. The following values indicate the
number of layers defined for each of the NN
processes. NN
þ
xxx
The
þ
xxx sequence is
repeated for each
defined process.
Table 7-19 Status Command SG
þ
global_status_code
Code# Global Condition Response Format