INFICON IC/5 Thin Film Deposition Controller - Manual (Page 24)

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IC/5 Operating Manual
1.4.3 Set-Up Parameters
# of Processes . . . . . . . . . . . . . . . . . 50
# of Layers . . . . . . . . . . . . . . . . . . . . 250 (total)
# of Materials . . . . . . . . . . . . . . . . . . 24
Density . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.99 gm/cc
Z-ratio. . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000 or Automatic
# of Sources . . . . . . . . . . . . . . . . . . . Any of 6 channels
Co-deposition . . . . . . . . . . . . . . . 2 sources may operate concurrently
Control Loop types . . . . . . . . . . . . . . (0,1,2) Non-PID, PI, PID
PID Control Mode. . . . . . . . . . . . . . . Fast or Slow Source
Process Gain . . . . . . . . . . . . . . . 0.01 to 100 Å/sec/%Power
Primary Time Constant. . . . . . . . 0.010 to 200.0 seconds
System Dead Time. . . . . . . . . . . 0.010 to 50.000 seconds
Master Tooling Factor. . . . . . . . . . . . 10.0 to 400.0%
Sensor Tooling Factor . . . . . . . . . . . 10.0 to 400.0%
Sensor Weight . . . . . . . . . . . . . . . . . 1.0 to 400.0%
Sensors . . . . . . . . . . . . . . . . . . . . . . 2 standard, 6 additional w/optional hardware
CrystalSix Position Select . . . . . Material designation of position(s)
Sensor Option . . . . . . . . . . . . . . . . . Enter 0 for "not used"
Enter 1 for "stop if last to fail"
Enter 2 for "time power if last to fail"
Enter 3 for "stop if failed"
Enter 4 for "time power if failed"
Maximum Source Power . . . . . . . . . 0.0 to 99.9%
Power Ramps. . . . . . . . . . . . . . . . . . 2 per material
Power Level . . . . . . . . . . . . . . . . 0.0 to 99.9%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Auto Soak 2 Power . . . . . . . . . . . . . Yes/No
Delay Option . . . . . . . . . . . . . . . . . . (0,1,2,3) None, Shutter Delay,
Control Delay, Both
Control Delay Time. . . . . . . . . . . . . . 00:00 to 99:59