INFICON IC/5 Thin Film Deposition Controller - Manual (Page 155)

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IC/5 Operating Manual
49 Sensor 6 Tooling
50 Sensor 7 Tooling
51 Sensor 8 Tooling
52 Sensor 1 Cal Thick
53 Sensor 2 Cal Thick
54 Sensor 3 Cal Thick
55 Sensor 4 Cal Thick
56 Sensor 5 Cal Thick
57 Sensor 6 Cal Thick
58 Sensor 7 Cal Thick
59 Sensor 8 Cal Thick
60 Sensor 1 Crystal Position
61 Sensor 2 Crystal Position
62 Sensor 3 Crystal Position
63 Sensor 4 Crystal Position
64 Sensor 5 Crystal Position
65 Sensor 6 Crystal Position
66 Sensor 7 Crystal Position
67 Sensor 8 Crystal Position
99 All Parameters (QM only)
The QM 99 ## command returns a string of values, each
separated by a space, in the order specified above for all
operational parameters 0 - 67, inclusive.
Table 7-6 Query Material Parameters (continued)
param# Material Parameter