INFICON IC/5 Thin Film Deposition Controller - Manual (Page 167)

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IC/5 Operating Manual
12 Idle State
13 Time Power
14 Pre-Deposit
15 Deposit
16 Post-Deposit
17 Manual
18 AutoTune
19 Thickness Limit
20 Final Thickness
21 Time Limit
22 Last Layer
23 Process End#
24 Layer End#
25 Material End#
26 Process#
27 Layer#
28 Material#
29 Source#
30 Sensor#
31 Stop
32 XTAL Fail #
33 Auto-Z Fail #
34 Max. Power
35 Shutter Error
36 Ready
37 Chopper Wheel
38 Computer Control
39 External Input #
40 Timer Active #
41 Timer Expired #
42 Counter Expired #
43 Statement #
44 Source Shutter
53 Rate < .1
54 Test
Table 7-17 Update Logic Statements - Output Event (continued)
event code Output Event