INFICON IC/5 Thin Film Deposition Controller - Manual (Page 161)

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IC/5 Operating Manual
11 Quality
12 Stability
13 Maximum Power
14 Soak Power 1
15 Rise Time 1
16 Soak Time 1
17 Soak Power 2
18 Rise Time 2
19 Soak Time 2
20 Auto Soak 2 Value is upper or lower case YES or NO
21 Delay Option
22 Control Delay
23 Feed Power
24 Feed Ramp Time
25 Feed Time
26 Idle Power
27 Idle Ramp Time
28 Sensor 1 Option
29 Sensor 2 Option
30 Sensor 3 Option
31 Sensor 4 Option
32 Sensor 5 Option
33 Sensor 6 Option
34 Sensor 7 Option
35 Sensor 8 Option
36 Sensor 1 Weight
37 Sensor 2 Weight
38 Sensor 3 Weight
39 Sensor 4 Weight
40 Sensor 5 Weight
41 Sensor 6 Weight
42 Sensor 7 Weight
43 Sensor 8 Weight
44 Sensor 1 Tooling
45 Sensor 2 Tooling
46 Sensor 3 Tooling
47 Sensor 4 Tooling
48 Sensor 5 Tooling
Table 7-12 Update Material Parameters (continued)
param# Material Parameter