INFICON IC/5 Thin Film Deposition Controller - Manual (Page 154)

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IC/5 Operating Manual
11 Quality
12 Stability
13 Maximum Power
14 Soak Power 1
15 Rise Time 1
16 Soak Time 1
17 Soak Power 2
18 Rise Time 2
19 Soak Time 2
20 Auto Soak 2
21 Delay Option
22 Control Delay
23 Feed Power
24 Feed Ramp Time
25 Feed Time
26 Idle Power
27 Idle Ramp Time
28 Sensor 1 Option
29 Sensor 2 Option
30 Sensor 3 Option
31 Sensor 4 Option
32 Sensor 5 Option
33 Sensor 6 Option
34 Sensor 7 Option
35 Sensor 8 Option
36 Sensor 1 Weight
37 Sensor 2 Weight
38 Sensor 3 Weight
39 Sensor 4 Weight
40 Sensor 5 Weight
41 Sensor 6 Weight
42 Sensor 7 Weight
43 Sensor 8 Weight
44 Sensor 1 Tooling
45 Sensor 2 Tooling
46 Sensor 3 Tooling
47 Sensor 4 Tooling
48 Sensor 5 Tooling
Table 7-6 Query Material Parameters (continued)
param# Material Parameter