INFICON IC/5 Thin Film Deposition Controller - Manual (Page 303)

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IC/5 Operating Manual
116 LiF 2.638 0.778 Lithium Fluoride
117 LiNbO
3
4.700 0.463 Lithium Niobate
118 Lu 9.840 *1.000 Lutetium
119 Mg 1.740 1.610 Magnesium
120 MgAl
2
O
4
3.600 *1.000 Magnesium Aluminate
121 MgAl
2
O
6
8.000 *1.000 Spinel
122 MgF
2
3.180 0.637 Magnesium Fluoride
123 MgO 3.580 0.411 Magnesium Oxide
124 Mn 7.200 0.377 Manganese
125 MnO 5.390 0.467 Manganese Oxide
126 MnS 3.990 0.940 Manganese (II) Sulfide
127 Mo 10.200 0.257 Molybdenum
128 Mo
2
C 9.180 *1.000 Molybdenum Carbide
129 MoB
2
7.120 *1.000 Molybdenum Boride
130 MoO
3
4.700 *1.000 Molybdenum Trioxdide
131 MoS
2
4.800 *1.000 Molybdenum Disulfide
132 Na 0.970 4.800 Sodium
133 Na
3
AIF
6
2.900 *1.000 Cryolite
134 Na
5
Al
3
F
14
2.900 *1.000 Chiolite
135 NaBr 3.200 *1.000 Sodium Bromide
136 NaCl 2.170 1.570 Sodium Chloride
137 NaCIO
3
2.164 1.565 Sodium Chlorate
138 NaF 2.558 0.949 Sodium Fluoride
139 NaNO
3
2.270 1.194 Sodium Nitrate
140 Nb 8.578 0.492 Niobium (Columbium)
141 Nb
2
O
3
7.500 *1.000 Niobium Trioxide
142 Nb
2
O
5
4.470 *1.000 Niobium (V) Oxide
143 NbB
2
6.970 *1.000 Niobium Boride
144 NbC 7.820 *1.000 Niobium Carbide
145 NbN 8.400 *1.000 Niobium Nitride
146 Nd 7.000 *1.000 Neodynium
147 Nd
2
O
3
7.240 *1.000 Neodynium Oxide
148 NdF
3
6.506 *1.000 Neodynium Fluoride
Table A-1 Material Table (continued)
Code Formula Density Z-Ratio Material Name