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INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

Table 7-18 Update Logic Statements - Input Action

action code

Input Action

0

Clear the Input Assignments

1

Start

2

Stop

3

Reset

4

Select Process #

5

Zero Thickness

6

Zero Time

7

Trigger Final Thickness

8

Switch XTAL #

9

XTAL Fail Inhibit On

10

XTAL Fail Inhibit Off

11

Soak Hold 1 On #

12

Soak Hold 1 Off #

13

Soak Hold 2 On #

14

Soak Hold 2 Off #

15

RateWatcher Hold On

16

RateWatcher Hold Off

17

RateWatcher Hold Inhibit On

18

RateWatcher Hold Inhibit Off

19

External Output On #

20

External Output Off #

21

Message On #

22

Message Off #

23

Set Timer (seconds) #

þ

## (two numeric qualifiers required;

# represents the timer number and ## represents the timer
value).

24

Set Timer (hours:minutes) #

þ

## (two numeric qualifiers

required; # represents the timer number and ## represents
the timer value).

25

Cancel Timer #

26

Set Counter #

27

Decrement Counter #

28

Non Deposit Clock Hold On

29

Non Deposit Clock Hold Off

36

Start Inhibit On

37

Start Inhibit Off