INFICON IC/5 Thin Film Deposition Controller - Manual (Page 176)

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IC/5 Operating Manual
8 RATE RAMP 1
9 DEPOSIT
(between RATE RAMPS
1 & 2)
10 RATE RAMP 2
11 DEPOSIT (after RATE
RAMP 2)
12 TIME POWER
13 FEED RAMP
14 FEED
15 IDLE RAMP
16 IDLE
17 MANUAL
18 STOP
19 AUTOTUNE MANUAL
20 AUTOTUNE TUNING
21 AUTOTUNE ERROR
22 AUTOTUNE RAMP
23 NOT ACTIVE
5 State time (mm:ss). xx:xx
þ
6 Layer time (mm:ss). xx:xx
þ
7 Active crystal. Returns the status of the crystal for
each of eight possible sensors defined for the
specified layer’s material. The value of w will be a
“G” for a good crystal, an “F” for a failed crystal, an
“I” for an invalid frequency reading and an “X”
indicates the sensor is not in use. wwwwwwww
8 Crystal life (%). Returns the crystal life for each of
eight possible sensors defined for the specific
layer’s material. The value of w will be a “G” for a
good crystal, an “F” for a failed crystal, an “I” for an
invalid frequency reading and an “x” indicates the
sensor is not in use. The value of xx indicates the
crystal life.
wwwwwwww
þ
xx
þ
to
wwwwwwww
þþ
xx
þþþ
xx
þþþ
xx
þþþ
xx
þþþ
xx
þþþ
xx
þþþ
xx
þþþ
xx
þ
(depending on the number of sensors in use for the specified layer).
9 Power source number.
þþ
x
þ
Table 7-20 Status Command SL
þ
layer_status_code
þ
Layer #
Code Channel Condition Response Format