INFICON IC/5 Thin Film Deposition Controller - Manual (Page 263)

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IC/5 Operating Manual
STOP Max Rate Exceeded . . . . . . . Indicates that tuning has stopped because
the MAXIMUM RATE parameter was
exceeded three times.
STOP Rate Too Low . . . . . . . . . . . . Indicates that tuning has stopped because
the initial rate was below 0.1 Å/s
12.6.5 AutoTune Preparation Instructions
The following procedure should be followed to perform an AutoTune:
1 Determine the Correct System Setup
In order to ensure good AutoTune results and good source control, careful
consideration should be given to eliminating system noise, thermal shorting,
and any other factors that result in rate instabilities.
2 Determine the Correct Material and Source Parameters
Because an evaporation source's behavior is material specific, careful attention
should be given to choosing the correct material and source parameters.
Choose the source's voltage range that best suits the material and evaporation
technique. Generally, low melting point materials use smaller ranges (0 to ±2.5
or 0 to ±5.0 Volts), while high melting point materials use the larger range (0 to
±10.0 Volts). (Refer to
section 8.3 on page 8-3 .)
3 Determine the Correct AutoTune Parameters
Material Index . . . . . . . . . . . . . . Choose the index number of the desired
material (from the Material Directory).
Desired Rate . . . . . . . . . . . . . . . Choose the rate at which to control the
deposition. This parameter is used only for a
Complete Tune.
Maximum Rate . . . . . . . . . . . . . Choose the maximum rate the system can
handle safely (i.e., source doesn't spit,
equipment is not damaged).
Quick Tune . . . . . . . . . . . . . . . . Choose either YES for Quick Tune or NO for
a Complete Tune.
4 Press the START AUTOTUNE function key (F5) and increase the power level
with the Hand-Held Controller until the rate is approximately one half the
desired rate.
5 Allow the source to come to an equilibrium by leaving the power level constant
for approximately three minutes.
6 When the source has reached equilibrium, press the START TUNING function
key (F5), and observe the instrument as it goes through the "tuning" portion of
AUTOTUNE.