INFICON IC/5 Thin Film Deposition Controller - Manual (Page 197)

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IC/5 Operating Manual
8.6 Error Messages in Source/Sensor Set-Up
BOTH SNSR ON IN MATL
Shown when attempting to change the Sensor type parameter to a Dual sensor
head while both sensors are turned on in a Material Set-Up display.
ILLEGAL INPUT - VALUE TOO LARGE
ILLEGAL INPUT - VALUE TOO SMALL
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press Clear to delete the
value and enter again.
ILLEGAL SENSOR TYPE
Sensor type may only be 1, 2, or 6.
INPUT IN USE
The input in question has already been reserved for use.
OUTPUT IN USE
Indicates the output in question is already reserved for use in Sensor or Source
Set-Up or in one of the Logic Statements.
SET AT RECORDER OUT
The value you are attempting to enter has been previously defined as a
recorder output in either the Material Set-Up display or one of the Sensor
Set-Up displays.
SET AS SOURCE OUT
The value you are attempting to enter has been previously defined as a Source
DAC output in one of the Source Set-Up displays.