INFICON IC/5 Thin Film Deposition Controller - Manual (Page 27)

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IC/5 Operating Manual
1.4.5 Source / Recorder Outputs
Quantity . . . . . . . . . . . . . . . . . . . . . . 6 BNC
Configuration . . . . . . . . . . . . . . . . . . User programmable for recorder
or source control.
Function Ranges
Source Control . . . . . . . . . . . . . . 0 to 10 V, 0 to -10 V, 0 to 5 V,
0 to -5 V, 0 to 2.5 V, 0 to -2.5 V
Recorder Output . . . . . . . . . . . . . 0 to 10 V
Current rating . . . . . . . . . . . . . . . . . . 20 mA per channel
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)
Update Rate . . . . . . . . . . . . . . . . . . . 10 Hz, maximum, (dependent on source
characteristics).
Recorder Output Functions . . . . . . . Aggregate Rate or Thickness or Rate
Deviation; Individual Sensor Rate, Thickness
or Rate Deviation; or Source Power.
Recorder Output Ranges
Rate . . . . . . . . . . . . . . . . . . . . . . 0 to 100 Å/sec, 0 to 1000 Å/sec
Thickness . . . . . . . . . . . . . . . . . . 0 to 100 Å, 0 to 1000 Å
Rate Deviation . . . . . . . . . . . . . . Desired rate ± 50 Å/sec
Accuracy. . . . . . . . . . . . . . . . . . . . . . ± 3% full scale
Zero Adjust . . . . . . . . . . . . . . . . . . . . Individual potentiometer