5 source maintenance display – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
3.3.5 Source Maintenance Display
Figure 3-10 Source Maintenance Display
3.3.5.1 Function Key Selection Choices for the
Source Maintenance Display
F1 SWITCH CRUCIBLE
To switch the source turret to the crucible position designated by the crucible
parameter, press function key F1.
F2 TOGGLE SENSOR SHUTTERS
To activate the shutter relay for the sensors associated with the designated
material, press function key F2. Pressing this key a second time deactivates the
sensor shutter relays.
F3 TOGGLE SOURCE
To activate the shutter relay for the source associated with the designated
material, press function key F3. A second pressing of this key deactivates the
source shutter relay.
F4 START MANUAL POWER
To enable the hand-held controller to effect power changes to the source output
associated with the chosen material, press function key F4. Pressing this key
a second time exits manual power.
NOTE: The MANUAL power level is automatically set to zero % power when
exiting Manual Power while in source maintenance. This is different
from executing a process. When executing a process, pressing the
Manual Power key a second time will place the instrument into the
Deposit State.
F5 AUTOTUNE
To activate the Autotune displays, press function key F5. See
for a description of Autotune and Autotune displays.
F6 MAIN/DIAG
To return to the Maintenance/Diagnostics display, press function key F6.