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INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

Figure 10-3 User Messages

These User Messages alert the operator to the status of the Process Cycle. Logic
Statements can be written to display these messages in the lower right hand
message area on the IC/5 CRT.

Figure 10-4 I/O Map Board 1

This display is used to assign alphanumeric names to the various Outputs and
Inputs connected to I/O Board 1. This is to help the design and understanding of
the Logic Statements. For this example the TTL Inputs monitored are:

1

A temperature sensor mounted onto the bottom of the diffusion pump to
indicate when the pump is at operating temperature.

2

An input connected to one side of the Double Pole Double Throw switch used
to turn on the mechanical pump. One half of this switch carries power to the
Mechanical Pump. The second half of the switch does not carry power but
provides a contact closure to indicate the switch is in the ON position.

3

This input monitors the Foreline Pressure relay from the Gauge.

4

This input monitors whether the Foreline Valve is closed.