Source 4-5, Spattering 11-4, Spreadsheet program 3-42 – INFICON IC/5 Thin Film Deposition Controller User Manual
Page 311: Spurious shift 2-10, Status code 7-28, Switches 10-8, Technical support 1-6, Test mode 3-39, Thickness shear mode 2-2, Thickness twist mode 2-2
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