INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Cygnus, Thin film deposition controller

Table of contents

Document Outline

Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Table Of Contents
Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 Cygnus 2 Safety
- 1.3 How To Contact INFICON
  - 1.3.1 Returning Your Cygnus 2
- 1.4 Cygnus 2 Specifications
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial Power-On Verification
Chapter 2 Installation and Interfaces
- 2.1 Location Guidelines
- 2.2 Avoiding Electrical Interference
- 2.3 Connecting the Controller
  - 2.3.1 Routing XIU Cables
  - 2.3.2 Interface Cable Fabrication and Pin-Out
Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 State Descriptions
- 3.5 Special Features
Chapter 4 Sensor & Source Set-Up
- 4.1 Sensor Set-Up Introduction
  - 4.1.1 Sensor Display Navigation
  - 4.1.2 Sensor Parameters
- 4.2 Source Set-Up Introduction
  - 4.2.1 Source Navigation
  - 4.2.2 Source Parameters
- 4.3 DAC Output Selection Rules
Chapter 5 Material Set-Up
- 5.1 Introduction
- 5.2 Special Material Parameter Features
  - 5.2.1 Skip Deposit
  - 5.2.2 RateWatcher™ Sample and Hold Feature
Chapter 6 General Parameters
- 6.1 General Set-Up Overview
- 6.2 General Process Page
- 6.3 DACs Page Parameters
- 6.4 COMM Page Parameters
- 6.5 MESSAGE Page Set-up
- 6.6 DATE / TIME Set Up
- 6.7 TEST Page Set Up
- 6.8 LOCK Page Code Set-up
- 6.9 AUDIO / VISUAL Page Set Up
Chapter 7 Digital I/O
- 7.1 Digital I/O Screen
- 7.2 All Input Page
- 7.3 All Output Page
- 7.4 I/O Board Page
  - 7.4.1 Output Type
Chapter 8 Logic Statement Set-Up
- 8.1 Logic Statement Overview
- 8.2 Editing the Logic Statements
- 8.3 IF Event Definitions
- 8.4 THEN Action Definitions
- 8.5 Logic Statement Example
Chapter 9 Remote Communications
- 9.1 Remote Communication Configuration Overview
- 9.2 Physical Connections
  - 9.2.1 RS-232C Serial Port
  - 9.2.2 TCP/IP Ethernet Port
    - 9.2.2.1 Network Connection
    - 9.2.2.2 How to Set Up the Network Protocol on the PC
- 9.3 Message Format
  - 9.3.1 Protocol
- 9.4 Communication Commands
Chapter 10 Maintenance and Calibration Procedures
- 10.1 Importance of Density, Tooling and Z-Ratio
- 10.2 Determining Density
- 10.3 Determining Tooling
- 10.4 Laboratory Determination of Z-Ratio
- 10.5 Source Maintenance
  - 10.5.1 Source Maintenance Parameters
- 10.6 System Status
Chapter 11 Counters & Timers
- 11.1 Introduction
Chapter 12 USB Storage
- 12.1 File Handling (USB)
  - 12.1.1 USB Storage Devices
- 12.2 Directory Structure
- 12.3 Configuration Files
- 12.4 Data Logs
- 12.5 Screen Captures
Chapter 13 Troubleshooting, Status and Error Messages
- 13.1 Status Messages
- 13.2 User Messages
- 13.3 STOP messages
- 13.4 Transient Messages
- 13.5 Input Error Messages
- 13.6 Troubleshooting Guide
- 13.7 Replacing the Crystal
- 13.8 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
Chapter 14 Measurement and Control Theory
- 14.1 Basics
Appendix A Material Table
- A.1 Introduction
Index
- A
- C
- D
- E
- F
- H
  - Handheld Controller 3-31
  - hardware handshaking 9-5
- I
- L
- M
- N
  - net mask 6-4
- O
  - Open Loop Method 14-11
- P
- Q
- R
- S
- T
- U
  - USB 12-1
- W
- Z
  - Z-match equation 14-5
  - Z-ratio 3-11, 5-3, 10-1, 10-3, 14-9