INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 143)

8 - 13
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
THICK SUM # ###
Sets the logic condition to be true when the sum of thickness indicated by the
designated Thickness Equation #, 1 to 3, reaches the thickness value ###
(0-999.9) kÅ.
TIME LIMIT
Sets the logic condition to be true once the Time Limit is achieved. The
condition remains true until the Material which has achieved Time Limit enters
the IDLE state or until a STOP/RESET sequence is executed.
TIME POWER
Sets the logic condition to be true upon entering a Time Power state. The
condition remains true until the end of the DEPOSIT state.
TIMER HH:MM # HH:MM
Sets the logic condition to be true when the designated timer # (1 to 20)
reaches the specified number of hours and minutes HH:MM, 00:00 to 99:59.
TIMER SECONDS # ###
Sets the logic condition to be true when the designated Timer # (1 to 20)
reaches the specified time expressed in seconds, sss.s, 0 to 999.9.
XTAL ACTIVITY < # ###
Sets the logic condition to be true whenever the Activity value ### on Sensor #
is less than the value entered for ### for at least 5 seconds. The condition
remains true until the Activity value is greater than ### for at least 5 seconds.
The Activity value ### can be 1 to 999. Numeric inputs for Sensor # range from
0 through 6 (0 for any Sensor).
XTAL FAIL #
Sets the logic condition to be true as long as there is a Crystal Fail on
Sensor #. In the case of a multi-position sensor, a Crystal Fail occurs when the
last available crystal fails. The logic condition remains false if the XTL FL INHB
Action is active (ON). The condition remains true until a working crystal is input
to the appropriate Sensor. Numeric inputs for Sensor # range from 0 through 6
(0 for any Sensor).
XTAL SWITCHING #
Sets the logic condition to be true while a crystal switch is taking place on
Sensor #. The condition remains true until the crystal switch is completed.
Numeric inputs for Sensor # range from 0 through 6 (0 for any Sensor).