INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 77)

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Cygnus 2 Operating Manual
3.5.1.2 XtalSix (CrystalSix)
On power-up, all crystals are read to determine how many good and bad crystals
are present. The Cygnus 2 uniquely identifies and tracks all six positions in the
CrystalSix.
During deposition, the Cygnus 2 will automatically switch to the next position with
a good crystal when there is a crystal failure. When the last good crystal fails the
Xtal Fail message is displayed, the Xtal Fail state becomes true and the Cygnus 2
will go directly to Time Power, POST DEP, STOP Material or STOP ALL, as
appropriate.
When the Sensor selected is a XtalSix, the relay contacts are pulsed closed for one
second, opened for one second, closed for one second, then opened for each
position. The first one second closure will advance the CrystalSix carousel into an
intermediate position between two crystals. Opening the closure for one second
allows the ratchet mechanism to relax whereupon the second contact closure
advances the next crystal into the proper position.
3.5.1.3 Xtal12 (Crystal12)
On power-up, Cygnus 2 will rotate the Sensor until position 1 is detected. It will
continue to rotate through the other 11 positions to determine the state of all
crystals. At the conclusion of the sequence, the Sensor Information screen shows
the Sensor in position 1 and the position number of any failed crystals. The
Crystal12 has resistors electrically in parallel for each of the 12 positions. The
Cygnus 2 verifies that the resistance value is correct at each position. If the value
is not as expected, the Cygnus 2 pulses again and rechecks the position. If position
1 is not detected or after 13 pulses of the wrong value, the Cygnus 2 reports a
Crystal Sw Fail message. In that case, all crystals are also marked as failed, except
for current position status.
When the carousel is removed from the Sensor for crystal replacements, the
Cygnus 2 displays Carousel Open. This message also appears if the connection
between the XIU (oscillator) and the sensor is absent. After the carousel is
replaced, the Cygnus 2 assumes the current position is 12 and all crystals are
failed. A Crystal Switch or Rotate Sensor function must be initiated in the Sensor
Information screen or via Remote Communication to enable the Cygnus 2 to
catalog the state of all crystals and to return to position 1. This must also be done
after the Sensor type has been changed to Xtal12. The Rotate Head function is
permitted only if the Material is in Ready, Stop or Idle.
During deposition, the Cygnus 2 will automatically switch to the next position with
a good crystal when there is a crystal failure. When the last good crystal fails, the
CrystalFail message is displayed, the Xtal Fail state becomes true and the Cygnus
2 will go directly to Time Power or STOP ALL, POST DEP, STOP Material, as
appropriate.