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INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Page 162

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9 - 14

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Cygnus 2 Operating Manual

24

(0x18)

DAC 1 Scale

0.1/

10.0/

10.0

REAL_3X1

Update not allowed if

Material using DAC is

running.

25

(0x19)

DAC 2 Scale

26

(0x1a)

DAC 3 Scale

27

(0x1b)

DAC 4 Scale

28

(0x1c)

DAC 5 Scale

29

(0x1d

DAC 6 Scale

30

(0x1e)

DAC 7 Scale

31

(0x1f)

DAC 8 Scale

32

(0x20)

DAC 9 Scale

33

(0x21)

DAC 10 Scale

34

(0x22)

DAC 11 Scale

35

(0x23)

DAC 12 Scale

Table 9-5 General parameters (continued)

QG

&

UG

Cmnd

ID

Name

(Units)

Range:

Low

Limit/

High

Limit/

Default

Data Type

Notes

Update Restrictions

and Display Notes