INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 191)

9 - 43
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Cygnus 2 Operating Manual
11
(0x0b)
Zero Counter Counter Range is 0-20
0 = All
12
(0x0c)
Zero Timer Timer Range is 0-20
0 = All
13
(0x0d)
Start Timer Timer Range is 1-20
14
(0x0e)
Cancel Timer Timer Range is 0-20
0 = All
15
(0x0f)
Clock Hold On Stops timer in Pre-Deposit or Post-Deposit. Keeps in
current state at current power setting.
Material Range 0-6 (0 = all Materials)
16
(0x10)
Clock Hold Off Restarts timer in Pre-Deposit or Post-Deposit
Material Range 0-6 (0 = all Materials)
17
(0x11)
User message on Message Range is 1-10
18
(0x12)
User message off Message Range is 1-10
19
(0x13)
Soak Hold 1 on Material Range is 0-6
(0 = all Materials)
20
(0x14)
Soak Hold 1 off Material Range is 0-6
(0 = all Materials)
21
(0x15)
Soak Hold 2 on Material Range is 0-6
(0 = all Materials)
22
(0x16)
Soak Hold 2 off Material Range is 0-6
(0 = all Materials)
23
(0x17)
Switch
Sensor
to
Sensor Range = 1 - 6
Crystal Range = 0 to maximum allowed crystals for the
requested Sensor. If Crystal # = 0, will switch to the "next"
crystal. If the Sensor is not used in a Material currently
running, the next crystal will be the next one in the
sequence. If the Sensor is used in a Material that is
running, the next crystal will be the next one from the XL
Position parameters sequence. If a Sensor is used in a
Material that is running, the value of "Crystal #" must be
zero, otherwise, an error will occur.
Table 9-15 Remote general (continued)
RG
Command
ID
Meaning Action Value Notes