INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 103)

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Cygnus 2 Operating Manual
DEAD TIME . . . . . . . . . . . . . . . . . . . 0.010 to 9999.99 s
This value is defined as the time difference between a change in % power and
the start of an actual change in rate. The default value is 1.0. This parameter is
disabled if the CONTROL LOOP option parameter is set to 0 (NonPID).
Figure 5-5 Control delay time DT
CRUC(IBLE) . . . . . . . . . . . . . . . . . . 1 to 64
The Crucible parameter is used in conjunction with the Number of Crucibles
selected in Source Set-Up. The value entered sets the state of the Crucible
relays. Values range from 1 to the number of Crucibles chosen, up to a
maximum of 64. This parameter is set to 1 if the Crucible function is not chosen
in configuring the Sources. The default value is 1.
MAXIMUM POWER . . . . . . . . . . . . . 0.01 to 99.99%
This parameter is used to set the maximum permissible % power level. The
control voltage output will not exceed this limit. The default value is 90.00%.
MAX POWER OPTION . . . . . . . . . . Continue (0), Post-Dep (1), Stop All (2),
Stop Matl (3)
This parameter provides a safety feature.
0 = Continue. Allows the Material to continue in its current state.
1 = PostDeposit. The Material will proceed to the programmed post deposit
state(s).
2 = Stop All. Source control voltages for all Materials are set to zero.
3 = Stop Material. Source control voltage for the designated Material is set to
zero.
The default setting is Stop Matl (3).
TIME
INCREASE POWER
RATE INCREASE
Control DT
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A
T
E
P
O
W
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R
TIME
INCREASE POWER
RATE INCREASE
Control DT
R
A
T
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P
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W
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R
y
Rate
Power