INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
SHUTTER OUT . . . . . . . . . . . . . . . . 0 to 38
This parameter designates which of the 38 outputs is to be used to activate the
Crystal Shutter for this Sensor. Values range from 0 to 38. Values 1 through 38
correspond to the appropriate output. Value 0 indicates that a shutter is not
used. The default value is 0. If a value other than 0 is entered, the output
chosen as the Crystal Shutter output is designated as such on the Digital I/O
display. The output is set to be true as long as the Material containing the
Sensor is in SHUTTER DELAY, DEPOSIT, NON DEPOSIT CONTROL,
MANUAL, or in the Sample period of the RateWatcher function. The condition
remains true until the end of POST DEPOSIT, TIME POWER, and HOLD, or
until a STOP command is received, or during the Hold period of the
RateWatcher function.
Auto-Z . . . . . . . . . . . . . . . . . . . . . . . No (0), Yes (1)
This parameter designates the method in which the Z-Ratio value will be
obtained for use in computing thickness with this Sensor. No indicates that the
Z-Ratio established in Material Definition is used. Yes indicates that the Auto-Z
calculation feature of the system is used. Auto-Z cannot be enabled on a crystal
which is “unable to Auto-Z”. Refer to
for details on
why a crystal is unable to Auto-Z. The default value is No for the Material
Z-Ratio.
Recorder Settings
OUTPUT. . . . . . . . . . . . . . . . . . . . . . 0 to 12
This parameter designates which of the DAC outputs is to be used as this
Sensor’s recorder output. Values range from 0 to 12. 0 indicates there is no
DAC used with this Sensor. Values 1 through 6 correspond to the six DAC BNC
outputs on the back of the Cygnus 2 labeled DAC 1 to DAC 6. DAC outputs 7
to 12 require the optional DAC output card.
FUNCTION. . . . . . . . . . . . . . . . . . . . (Unfiltered) Rate (0), Thick (1), RateDev (2)
This parameter determines the function of the Sensor’s recorder output.
Default is 0 for the unfiltered Rate, not affected by the Rate Filter Time.
RANGE . . . . . . . . . . . . . . . . . . . . . . 0 to 99999 (for Rate and Thick)
The full scale range value selected corresponds to General Parameter DAC
Scale and Polarity. Default is 100. Grayed out if RateDev is selected.