INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
If the deposition rate meets the RateWatcher Accuracy requirement for the duration
of the Acceptance Window Time, the sensor shutter is closed and RateWatcher
enters Hold phase for the RateWatcher Time duration.
Finally, after the Hold Time has elapsed, RateWatcher will enter a 5 second Delay
phase. During the Delay phase, the crystal is exposed to the deposition, but the
accumulated rate and sustained power are that from the previous Hold phase. This
Delay phase allows the crystal to thermally stabilize to the deposition before
re-entering the RateWatcher Sample phase.
The RateWatcher Sample Acceptance Window Time (that is, the length of time that
the rate must be within the accuracy range before going into hold) will be calculated
as follows:
RateWatcher OPTION. . . . . . . . . . . No (0), Yes (1)
Default is No (0) which disables the function and greys out the Time and
Accuracy parameters.
RateWatcher TIME . . . . . . . . . . . . . 00:00 to 99:59 min:s
Ratewatcher Time determines the time interval between sample periods. The
crystal shutter relay is in its normal state during this time. Values range from
00:00 to 99:59 minutes:seconds. The default value is 00:00, which disables the
function.
During a Rate Ramp, the Sample and Hold feature is inactive; the crystal
shutter is open and the rate is controlled by the crystal.
RateWatcher ACCURACY . . . . . . . 1 to 99%
During the rate sampling period, the deposition rate is measured by the crystal;
source power control is active. When the rate is within the desired accuracy
continuously for five seconds, the shutter is closed and the deposition state
returns to HOLD. The minimum accuracy is 1% or 0.1 Å/s, whichever is greater.
Values range from 1 to 99%. The default value is 5%
Time
Power
Avg Time
Rate
Filter
Time
RateWatcher
Sample
Acceptance
Window
Time
Rate and Power Averages Used
0 min
<10 sec
5 seconds
2.5 minus 0.5 second averages
0 min
10 sec
10 seconds
2.5 minus 0.5 second averages
1 min
anything
60 seconds
2.5 minus 0.5 second averages
>1 min
anything
Average
Time * 60
seconds
Average of minute averages (as with Time
Power) of Average Time - 1 minute