INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 67)

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Cygnus 2 Operating Manual
3.3.6.6 Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays
These three libraries allow convenient selection of a Material by its chemical
formula along with the correct density and Z-Ratio values. Cursor to a Material
formula, then press F1 Define Material to select that Material. The Material/Source
display will be shown where the remaining parameters can be entered. See
section
5.1.2, Material Definition, on page 5-2 .
3.3.7 General
The General screen is organized into eight sub screens described below.
See Chapter 6, General Parameters for programming details and screen displays.
3.3.7.1 Process Page
The Process page shows global parameters and allows editing them.
Figure 3-12 Process page
Thickness Eq 1, 2 and 3. . . . . . . . . allows summing of thicknesses from up to 6
Sources for use in conjunction with a logic
statement Thick Sum event.
See section 6.2, General Process Page, on page 6-1
3.3.7.2 DACs Page
Polarity and full scale voltage for all DAC outputs are configured here. 0 output
corresponds to 0 Volts. See
section 6.3, DACs Page Parameters, on page 6-2 .