INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 88)

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Cygnus 2 Operating Manual
3.5.9.2 Page Format ASCII Example:
To USB Storage Device and/or RS-232 Protocol Dlog Page for Material #1.
DATE: 09/16/2010
TIME: 09:13
LAYER #: 1
MATERIAL NAME: ONE
LAYER TIME: 01:02
DEPOSITION TIME: 01:02
THICKNESS: 2.504 kAng
AVE. AGG. RATE: 40.0 Ang/S
AVE. RATE DEV.: 0.0 Ang/S
ENDING POWER: 0.0 %
AVE. POWER: 0.0 %
WHERE NEXT: Post Deposit
COMPLETION MODE: NORMAL
If Datalog Xtal Info was set to Yes, Crystal History is also sent as shown:
Sensor number of the sensor used, Crystal number of crystal(s) used, labels and
values are sent in the order displayed below.
SENSOR 1
BEG. END BEG. END BEG. END
XTAL FREQ. FREQ. LIFE LIFE ACT. ACT. STAB. QUAL.
1 5976244 5976243 0% 0% 187 189 0 0
3 5966388 5966388 0% 0% 331 328 0 0
5 5971051 5971051 0% 0% 669 674 00
If there is a minus sign in front of the Freq value, it indicates that this crystal failed
during the layer. The frequency value shown in that case is the last valid reading
obtained before the crystal failed.