INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 169)

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Cygnus 2 Operating Manual
9.4.8 Query Sensor Parameter
Command = QS
Command ID = See Table 9-7 .
Sensor Number = Sensor number 1 - 6
Response = |
Type of response depends on command ID, see "Data Type" column in Table 9-7 .
9.4.9 Update Sensor Parameter
Command: = US
Command ID = See Table 9-7
Sensor Number = Sensor number 1 - 6
Parameter Value = | Type of value depends on command ID,
see Data Type column in
Table 9-7 .
Response = None (Just header and trailer)
Table 9-7 Sensor parameters
QS
&
US
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes
1
(0x01)
(Sensor) Shutter
Out(put)
0/ 38/ 0 Integer 0 = not defined
Update not allowed if the Sensor is running. Not
accepted if output in use by other hardware
2
(0x02)
Sensor Type 0/ 4/ 0 Encode 0 = Single 1 = XtalTwo
2 = XtalSix 3 = Xtal12
4 = Generic
Update not allowed if
the Sensor is running.
3
(0x03)
(Sensor) Switch
Out(put)
0/ 38/ 0 Integer 0 = not defined
Gray font if Sensor Type =
Single
Update not allowed if
the Sensor is running.
Not accepted if output
in use by other
hardware.
4
(0x04)
Auto-Z 0/ 1/ 0 Encode 0 = No, 1 = Yes