INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

CRUC SWCH FAIL

Sets the logic condition to be true if a Turret Feedback input is specified and is
not received within the allocated time span. The condition remains true until the
input arrives or a Reset is done.

CRUCIBLE SWITCH

Sets the logic condition to be true while switching crucibles. The condition
remains true until the turret delay time has expired or the turret input arrives or
a Reset is done.

DEPOSIT

Sets the logic condition to be true at the beginning of the Deposit state. The
condition remains true until the end of the DEPOSIT state, or when a
STOP/RESET or STOP/START sequence is executed. Rate Ramps, Time
Power and Manual are considered part of the Deposit state.

EXTERNAL INPUT ## (## can be 1 to 28)

Designates a hardware input which, when it changes state, can be used to
trigger an Action. Inputs can be given names up to 15 characters long. Inputs
are activated by pulling the specific input’s terminal to ground (<0.8 V) through
a contact closure to common (GND) or with TTL/CMOS logic having current
sink capability of 2 mA (1 low power TTL load).

FEED

Sets the logic condition to be true at the start of Feed Time. The condition
remains true until the end of Feed Time. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.

FEED RAMP

Sets the logic condition to be true at the start of Feed Ramp. The condition
remains true until the end of Feed Ramp. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.

FINAL THICK

Sets the logic condition to be true once the Final Thickness is achieved while
in Deposit or Manual or when the Final Thickness Trigger action is activated.
The condition remains true until the Material which has achieved Final
Thickness enters the IDLE state, or until a Zero Thickness or a STOP/RESET
sequence is executed.