INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

PRE-DEPOSIT

Sets the logic condition to be true at the beginning of the Ready, Source Switch,
Shutter Delay, PreCond, Rise 1, Rise 2, Soak 1, or Soak 2 state. The condition
remains true until the Deposit, Manual, or any Post-Deposit state is entered.

RATE <0.1

This condition will evaluate true when the actual deposition rate is less than
0.1 Å/s for more than 5 seconds while in Deposit or Manual. The condition
remains true until the actual deposition rate is greater than 0.1 Å/s for
5 seconds or more, when the Material reaches Idle or on Stop/Reset.

RATE DEV ERR

This condition will evaluate true when the actual deposition rate differs from the
rate setpoint by the larger of 5% or 0.1 Å/s for more than 60 seconds or 20 times
the control loop time constant while in Deposit. The condition remains true until
the Material leaves deposit.

RATE RAMP 1

Sets the logic condition to be true at the beginning of Rate Ramp 1. The
condition remains true until the end of Rate Ramp 1. The condition is also
cleared when entering the Manual state, and when a STOP/RESET or a
STOP/START sequence is executed.

RATE RAMP 2

Sets the logic condition to be true at the beginning of Rate Ramp 2. The
condition remains true until the end of Rate Ramp 2. The condition is also
cleared when entering the Manual state, and when a STOP/RESET or a
STOP/START sequence is executed.

READY

Sets the logic condition to be true as long as the Cygnus 2 is in the READY
state. The condition remains true until a START command is received or when
entering Manual State.

RISE 1

Sets the logic condition to be true at the start of Rise Time 1. The condition
remains true until the end of the Rise Time 1. The condition is also cleared
when entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.

NOTE: This state, PRECOND RISE, PRE-COND SOAK, and SOAK 1 are

skipped if the same Material was used and has a non-zero Idle power.