INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 208)

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Cygnus 2 Operating Manual
10.5.1 Source Maintenance Parameters
NOTE: Remote Comm is not allowed while in Source Maintenence.
SOURCE MAINTENANCE . . . . . . . Enabled/Disabled
Cygnus 2 must be in Ready to Enable and must be Disabled to return to normal
operation. Default is Disabled.
MATERIAL NUMBER . . . . . . . . . . . 1 to 6
While in Maint Stop, select the Material associated with the Source or Sensor
to be checked. Material cannot be changed while in Manual.
10.5.1.1 Crucible Rotation
If the Cygnus 2 has been configured for a multi-position crucible indexer, pressing
the F1 key will advance it to the next position. Settting the "Switch to Crucible"
parameter to one of the positions before pressing F1 will activate the programmed
crucible indexer outputs to rotate to the specified position.
The F1 key is greyed out for a single position crucible to indicate it is not active.
10.5.1.2 Toggle Sensor and Source Shutter
Press the F2 key to toggle Sensor shutter associated with this Material.
Press the F3 key to toggle the Source shutter for this Material’s Source.
10.5.1.3 Start/Stop Manual Power
Press the F4 key to start Manual mode. Once in manual mode, use the optional
hand-held controller to increase or decrease the power.