INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

NUMBER OF CRUCIBLES . . . . . . . One(0), Four(1), Eight(2), 16(3), 32(4), 64(5)

Values in brackets are for use with remote communication commands. Refer to

section 3.5.2, Source/Crucible Selection, on page 3-28

for an example of

programming Turret source crucible selection. This parameter can be used to
automatically index the turret position when using a multiple pocket turret
source. The value is selected using the TOGL and ENTER keys. The default
value is 0 and indicates a single pocket source. If a 0 is chosen, the parameters
Crucible Output, Turret Feedback and Turret Delay or Turret Input are grayed
out on the Display. The number of crucibles determines the number of relays
needed for the crucible output. As the relays are binary encoded (actual coding
is binary - 1, with 000 representing position 1 and 111 representing position 8),
2 relays are needed for 4 crucibles, 3 for 8, 4 for 16, 5 for 32 and 6 for 64.

CRUCIBLE OUTPUT. . . . . . . . . . . . 0 to 37

This parameter designates which of the outputs are to be used as Crucible
Outputs. Values range from 0 to 37. The default is 0 and indicates the Crucible
Output is inactive. The value entered into this parameter indicates which of the
outputs begins the sequence of outputs used as crucible control outputs. For
example, a Four(1) entered into the Number of Crucibles parameter and a 1
entered into the Crucible Output parameter will designate output relays 1 and
2 as crucible control outputs with the least significant bit of the binary coding in
relay output 1. An Eight(2) entered into the Number of Crucibles parameter and
a 1 entered into the Crucible Output parameter will designate output relays 1,
2, and 3 as crucible control outputs with the least significant bit of the binary
coding in relay output 1.

TURRET FEEDBACK . . . . . . . . . . . Yes (1), No (0)

Some turret source indexers provide feedback to signify when the turret is in
the proper position. This parameter allows the Cygnus 2 to accept this input
and respond accordingly. Parameter entry may be either Yes or No. Yes
indicates that Turret Feedback is expected and the Turret Input parameter is
displayed on the screen. No indicates there is no Turret Feedback. The default
value is No. See the Turret Input and Turret Delay descriptions below.

NOTE: If the turret feedback is set to Yes and the Material is STARTed, the

Cygnus 2 will proceed to the CRUCIBLE SW state. If the turret input is
not received within the Turret Delay time, the Material will STOP.

TURRET INPUT. . . . . . . . . . . . . . . . 0 to 28

This parameter designates which of the 28 inputs is to be the Turret Feedback
input. Values range from 0 to 28. Values 1 through 14 correspond to the
appropriate input on I/O Relay Module 1, values 15 to 28 require the I/O Relay
Module 2. Value 0 indicates that an input for turret feedback is not used. The
default value is 0. However, an input must be assigned or the state sequence