INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 90)

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Cygnus 2 Operating Manual
3.5.10 DAC Monitoring
Cygnus 2 continually compares the actual output voltages at the DAC BNC
connectors with the internally generated values to detect external or internal
equipment malfunction. If the values do not agree, Cygnus 2 takes the following
action:
If the DAC output is assigned for Source control:
 Stop the Material.
 Display Source Fault message.
 Set this Source Output to zero.
If the DAC output is assigned for Recorder use:
 Set this output to zero.
 Display Recorder Fault message.
Both types of faults remain active until a RESET is performed.
3.5.11 Trend Analysis
Along with control of the deposition process, the Cygnus 2 allows rate and
thickness information from individual quartz crystal sensors to be output to the
Digital-to-Analog (DAC) outputs. This enables mapping of an individual sensor's
information, which is useful in monitoring the change in source flux distribution
during the deposition process.
3.5.11.1 Cygnus 2 Parameters Associated with the Trend Analysis Feature
RECORDER OUTPUT. . . . . . . . . . . 0 to 12
This parameter designates which of the DAC outputs is to be used as a
recorder output. 0 indicates there is not a DAC identified with this particular
Material. Values 1 through 6 correspond to the six DAC BNC outputs on the
back of the Cygnus 2 labeled DAC 1 to DAC 6. DAC outputs 7 to 12 require the
optional DAC outputs card.
SENSOR RECORDER FUNCTION . Rate/Thick/RateDev
This parameter determines the function of the Sensor’s recorder output.
Default is (Unfiltered) Rate, not affected by the Rate Filter Time.
RECORDER RANGE. . . . . . . . . . . . 0 to 99999
The full scale range value selected corresponds to the value selected in the
General/DACs page for the DAC output. Default value is 100.
A recorder output cannot be associated with a DAC that is configured as a Source
output. An error message will be displayed if this is attempted.