INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Page 230

13 - 14

N 07

Cygnus 2 Operating Manual

9 Crystal fail message is
always on

a. XIU/oscillator not
connected

a. Verify proper
sensor/oscillator
connections. See items c, d,
e, f, g, h below.

b. XIU/oscillator
malfunctioning

b. Use Test XIU diagnostic
function to determine if
cause is Cygnus 2 / XIU / XIU
cables or if cause is
Feedthrough / Sensor /
Crystal. If available, insert a
known working XIU/oscillator
in place of suspect one; if
XIU/oscillator is confirmed
bad, contact INFICON
service department

c. Defective cable from
feedthrough to XIU/oscillator
or from Cygnus 2 to
XIU/oscillator

c. Use an ohm meter or DVM
to check electrical continuity
or isolation as appropriate

d. Poor electrical contact in
the transducer,
feedthroughs, or in-vacuum
cable

d. Use an ohm meter or DVM
to check electrical continuity
or isolation as appropriate

e. Failed crystal/no crystal

e. Replace crystal/insert
crystal

f. Two crystals placed into the
crystal holder

f. Remove one of the crystals

g. Frequency of crystal out of
range

g. Verify that the crystal
frequency is within the
required range, use
INFICON crystals.

h. S & Q values exceed
programmed values

h. Clear S & Q via Remote
Comm or Function Key F3 on
Sensor Information page,
see

Table 13-6 Troubleshooting the Cygnus 2 (continued)

SYMPTOM

CAUSE

REMEDY