INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
3.3.6.3 Sensor Page
The Material Sensor page, see
, allows selecting the Tooling factor.
Other choices will be shown according to the Sensor Type. If the Sensor is a
CrystalTwo, the Tooling factor for the secondary crystal can be specified. In the
case of a multi-position rotary sensor head, the range of crystal positions to use can
be specified.
In addition, Quality and Stability settings are available to force a crystal switch to a
backup crystal when the primary crystal starts to become unstable.
Figure 3-11 Material sensor page
3.3.6.4 Pre/Post Page
Up to three pre-deposition phases with rise times, power levels and soak times can
be specified. Also, Auto Soak 2 can be enabled as well as Shutter or Control Delay.
See
section 5.1.5, Pre/Post Screen Deposit Page Parameters, on page 5-10
.
3.3.6.5 Deposit Page
Set the desired deposition rate, Final Thickness, Thickness Limit, Time Limit, Rate
Filter Time, Time Power Avg Time, Ion Assist Deposit, and the state to enter after
reaching Final Thickness.
Two new rates can be specified while in Deposit and RateWatcher can be enabled.
See