INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 168)

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Cygnus 2 Operating Manual
115
(0x73)
Failure Action 1/ 4/ 3 Encode 1 = PostDp 2 = Stop All
3 = Stop Matl 4 = TimePw
116
(0x74)
CrystalTwo
Tooling (%)
1.0/
999.9/
100.0
REAL_4X1
Gray font if Sensor Type is not CrystalTwo
117
(0x75
Xtal Position First 0/ 12/ 0 Integer
Gray font if Sensor Type is Single,
CrystalTwo or Generic
118
(0x76)
Xtal Position Last 0/ 12/ 0 Integer
Gray font if Sensor Type is Single,
CrystalTwo, or Generic
121
(0x79)
Quality Percent
(%)
0/ 99/ 0 Integer
122
(0x7a)
Quality Counts 0/ 99/ 0 Integer
123
(0x7b)
Stability Single
(Hz)
0/ 9999/ 0 Integer 1-24 are excluded
124
(0x7c)
Stability Total
(Hz)
0/ 9999/ 0 Integer 1-24 are excluded
125
(0x7d)
Recorder Output 0/ 12/ 0 Integer 0 = No recorder Not allowed to be the
same as a Source DAC
126
(0x7e)
Recorder Function 0/ 3/ 0 Encode 0 = Filtered Rate 1 = Thick
2 = RateDev 3 = Power
Gray font if recorder
output set to 0
127
(0x7f)
Recorder Range 0/ 99999/
100
Integer Gray font if recorder output is set to 0 or Recorder
Function is Power or Rate Deviation
Time Note: Times are displayed as mm:ss. Times are stored as seconds.
The maximum number of seconds is 5999. This would be displayed as 99:59.
Table 9-6 Material parameters (continued)
QM
&
UM
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes