INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 194)

9 - 46
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
10
(0x0a)
Set Averaged
Rate
Range is 0-999.9. Only in Time power or Non Deposit Hold - the
estimated rate used.
11 (0x0b) Start
12 (0x0c) Reset Material
Table 9-16 Remote material (continued)
RL
Command
ID
Meaning Action
Value
Notes