INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Cygnus, Thin film deposition controller

background image

O

P

E

R

A

T

I

N

G

M

A

N

U

A

L

Cygnus

®

2

Thin Film Deposition Controller

IPN 074-545-P1E

Cover Page

Table of contents

Document Outline

Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Table Of Contents
Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 Cygnus 2 Safety
- 1.3 How To Contact INFICON
  - 1.3.1 Returning Your Cygnus 2
- 1.4 Cygnus 2 Specifications
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial Power-On Verification
Chapter 2 Installation and Interfaces
- 2.1 Location Guidelines
- 2.2 Avoiding Electrical Interference
- 2.3 Connecting the Controller
  - 2.3.1 Routing XIU Cables
  - 2.3.2 Interface Cable Fabrication and Pin-Out
Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 State Descriptions
- 3.5 Special Features
Chapter 4 Sensor & Source Set-Up
- 4.1 Sensor Set-Up Introduction
  - 4.1.1 Sensor Display Navigation
  - 4.1.2 Sensor Parameters
- 4.2 Source Set-Up Introduction
  - 4.2.1 Source Navigation
  - 4.2.2 Source Parameters
- 4.3 DAC Output Selection Rules
Chapter 5 Material Set-Up
- 5.1 Introduction
- 5.2 Special Material Parameter Features
  - 5.2.1 Skip Deposit
  - 5.2.2 RateWatcher™ Sample and Hold Feature
Chapter 6 General Parameters
- 6.1 General Set-Up Overview
- 6.2 General Process Page
- 6.3 DACs Page Parameters
- 6.4 COMM Page Parameters
- 6.5 MESSAGE Page Set-up
- 6.6 DATE / TIME Set Up
- 6.7 TEST Page Set Up
- 6.8 LOCK Page Code Set-up
- 6.9 AUDIO / VISUAL Page Set Up
Chapter 7 Digital I/O
- 7.1 Digital I/O Screen
- 7.2 All Input Page
- 7.3 All Output Page
- 7.4 I/O Board Page
  - 7.4.1 Output Type
Chapter 8 Logic Statement Set-Up
- 8.1 Logic Statement Overview
- 8.2 Editing the Logic Statements
- 8.3 IF Event Definitions
- 8.4 THEN Action Definitions
- 8.5 Logic Statement Example
Chapter 9 Remote Communications
- 9.1 Remote Communication Configuration Overview
- 9.2 Physical Connections
  - 9.2.1 RS-232C Serial Port
  - 9.2.2 TCP/IP Ethernet Port
    - 9.2.2.1 Network Connection
    - 9.2.2.2 How to Set Up the Network Protocol on the PC
- 9.3 Message Format
  - 9.3.1 Protocol
- 9.4 Communication Commands
Chapter 10 Maintenance and Calibration Procedures
- 10.1 Importance of Density, Tooling and Z-Ratio
- 10.2 Determining Density
- 10.3 Determining Tooling
- 10.4 Laboratory Determination of Z-Ratio
- 10.5 Source Maintenance
  - 10.5.1 Source Maintenance Parameters
- 10.6 System Status
Chapter 11 Counters & Timers
- 11.1 Introduction
Chapter 12 USB Storage
- 12.1 File Handling (USB)
  - 12.1.1 USB Storage Devices
- 12.2 Directory Structure
- 12.3 Configuration Files
- 12.4 Data Logs
- 12.5 Screen Captures
Chapter 13 Troubleshooting, Status and Error Messages
- 13.1 Status Messages
- 13.2 User Messages
- 13.3 STOP messages
- 13.4 Transient Messages
- 13.5 Input Error Messages
- 13.6 Troubleshooting Guide
- 13.7 Replacing the Crystal
- 13.8 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
Chapter 14 Measurement and Control Theory
- 14.1 Basics
Appendix A Material Table
- A.1 Introduction
Index
- A
- C
- D
- E
- F
- H
  - Handheld Controller 3-31
  - hardware handshaking 9-5
- I
- L
- M
- N
  - net mask 6-4
- O
  - Open Loop Method 14-11
- P
- Q
- R
- S
- T
- U
  - USB 12-1
- W
- Z
  - Z-match equation 14-5
  - Z-ratio 3-11, 5-3, 10-1, 10-3, 14-9