INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 171)

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Cygnus 2 Operating Manual
Table 9-8 Source parameters
QC
&
UC
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes
1
(0x01)
DAC Output 0/ 12/ # Integer 0 = not defined.
Default for Source 1 is 1,
Source 2 is 2, etc.
Update not allowed if
Source is running. Not
allowed to set if the
DAC is set as a
recorder output.
2
(0x02)
(Source) Shutter
Output
0/ 38/ 0 Integer 0 = not defined.Update not allowed if
Source is running.
3
(0x03)
Number of
Crucibles
0/ 5/ 0 Encode 0 = 1 1 = 4 2 = 8
3 = 16 4 = 32 5 = 64
Update not allowed if
Source is running.
4
(0x04)
Crucible Output 0/ 38 /0 Integer 0 = not defined
Gray font if Number of
Crucibles = 0
5
(0x05)
Turret Feedback 0/ 1/ 0 Encode 0 = No 1 = Yes
Gray font if Number of
Crucibles = 0
6
(0x06)
Turret Input 0/ 28/ 0 Integer 0 = not defined
Gray font if Turret
Feedback = No or if
Number of Crucibles = 1
7
(0x07)
Turret Delay
(Seconds)
2/ 180/ 5 Integer Time out interval with
feedback.Delay interval
without feedback.
Gray font if Number of
Crucibles = 0 or if Number
of Crucibles = 1