INFICON Cygnus 2 Thin Film Deposition Controller User Manual
Page 196
9 - 48
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
9.4.33.4 Query Material Parameter, Z-Ratio (2), Material 1
Command Format: QM
QM2 1
Command QM2 1: 0400514D0201A1
Response: 070000F10648E1BA3E18
9.4.33.5 Update Material Parameter, Control Loop (4), Material 1, PID (2)
Command Format: UM
UM4 1 2
Command UM4 1 2: 0800554D040102000000A9
Response: 0300000D0613
9.4.33.6 Query Sensor Parameter, Shutter Output (1), Sensor 1
Command Format: QS
QS1 1
Command QS1 1: 040051530101A6
Response: 0700008706000000008D
9.4.33.7 Update Sensor Parameter, Sensor Type (2), Sensor 1, CrystalTwo (1)
Command Format: US
US2 1 1
Command US2 1: 08005553020101000000AC
Response: 0300002F0635
9.4.33.8 Query Source Parameter, Shutter Output (2), Source 1
Command Format: QC
QC2 1
Command QC2 1: 04005143020197
Response: 0700003F060000000045
9.4.33.9 Update Source Parameter, Number of crucibles (3), Source 1, 4 crucibles (1)
Command Format: UC
UC3 1 1
Command UC3 1 1: 080055430301010000009D
Response: 03000054065A
- TGF10 Tracer Gas Filler (36 pages)
- Sensistor ILS500 F Leak Detection Filler (90 pages)
- T-Guard Leak Detection Sensor (85 pages)
- T-Guard Leak Detection Sensor Interface description (40 pages)
- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
- Sensistor ISH2000 HySpeed Hydrogen Leak Detector (54 pages)
- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
- UL1000 Fab Dry Helium Leak Detector (119 pages)
- HLD6000 Refrigerant Leak Detector (76 pages)
- HLD6000 Refrigerant Leak Detector Interface Description (40 pages)
- IO1000 I/O module (18 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector (92 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description (36 pages)
- Sensistor XRS9012 Hydrogen Leak Detector User Manual (28 pages)
- Sensistor XRS9012 Hydrogen Leak Detector Maintenance manual (14 pages)
- Extrima Ex-certified Hydrogen Leak Detector (62 pages)
- Sensistor ILS500 Leak Detection System (107 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (108 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (58 pages)
- Sensistor Sentrac Hydrogen Leak Detector (86 pages)
- Protec P3000(XL) Helium Leak Detector (132 pages)
- Pilot Plus Vacuum Gauge (2 pages)
- CO Check Carbon Monoxide Meter (2 pages)
- GAS-Mate Combustible Gas Leak Detector (12 pages)
- Whisper Ultrasonic Leak Detector (8 pages)
- Vortex AC Refrigerant Recovery Machine 115V (20 pages)
- Vortex AC Refrigerant Recovery Machine 230V (16 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (2 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (44 pages)
- D-TEK CO2 Refrigerant Leak Detector (12 pages)
- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
- Explorer Portable Gas Chromatograph (369 pages)
- MicroFID II Portable Flame Ionization Detector (89 pages)
- DataFID Portable Flame Ionization Detector for Landfill Emissions Monitoring (91 pages)
- Hydrostik Hydrogen Fuel Cylinder Installation (7 pages)