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INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

Test

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Not Used

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Rate Dev(iation)

Err(or)

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Note 1: Seconds are entered via remote communications as tenths of seconds. Seconds
are entered by keyboard as whole numbers.
Note 2: The time is entered via remote communications as whole minutes. 99 hours =
5940 minutes, so 99 hours + 59 minutes = 5999 minutes maximum. The time entered by
keyboard is in hours and minutes.
Note 3: Maximum number of minutes is 59. The entry of '00:65' is invalid. That time can
be entered as '01:05'.
Note 4: Thick Sum will be sent as an integer Angstroms (the number multiplied by 1000).

Table 9-10 Event list (continued)

Events

1st

numeric

(1 Byte)

(XXX)

Min Max

2nd

numeric

(Integer)

(YYY)

Min

Max

Logic

Code

Logic

Code

Negated