INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
MINIMUM POWER . . . . . . . . . . . . . 0.00 to 99.98%
This parameter is used to set the minimum permissible % power level. It must
be less than the Maximum Power value. The control voltage output will not
exceed this limit. The default value is 0.00%.
RECORDER OUTPUT. . . . . . . . . . . 0 to 12
There are twelve (six standard, six optional) DAC outputs available which may
be divided among Source control voltage outputs, individual Sensor
rate/thickness recorder outputs, aggregate rate/thickness or power level
recorder outputs. A value of zero indicates there is not a recorder output
chosen for that function. Values 1 through 6 correspond to the six DAC BNC
outputs on the back of the Cygnus 2 labeled DAC 1 to DAC 6. DAC outputs 7
to 12 require the optional DAC outputs card. The default value is zero for
Filtered Rate, see Rate Filter Time in
RECORDER FUNCTION . . . . . . Filtered Rate (0), Thick(ness) (1),
RateDev(iation)(2), Power (3)
Default is Zero.
RECORDER RANGE. . . . . . . . . 0 to 99999 (for Rate and Thick)
Selects the full scale value in the appropriate units, Parameter is grayed out for
RateDev and Power. Units are Å/s for Rate and Å for Thickness. Default value
is 100. Full scale values are fixed at +/- 10 or 20 Å/s for Rate Deviation,
depending on what was selected on the Operate screen and 100% for Power.