INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

Time Limit (in Deposit) . . . . . . . . . . . 00:00 to 99:59 min:s

Rate Filter Time . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, or 10.0, 20.0, 30.0 s

Time Power Averaging Time . . . . . . 0 to 30 minutes

Ion Assist Deposit . . . . . . . . . . . . . . Yes/No

On Final Thickness . . . . . . . . . . . . . Continue, Post-Dep(osit),

NonDep(osit)Cont(rol)

New Rate while in Deposit . . . . . . . . 2 Rate Ramps per Material

New Rate 1 or 2 . . . . . . . . . . . . . 0.000 to 999.9 Å/s

Start Ramp 1 or 2 . . . . . . . . . . . . 0.000 to 999.9 kÅ

Ramp Time 1 or 2. . . . . . . . . . . . 00:00 to 99:59 min:s

RateWatcher® . . . . . . . . . . . . . . . . Sample and Hold Feature

(RateWatcher) Option. . . . . . . . . Yes/No

(RateWatcher) Time . . . . . . . . . . 00:00 to 99:59 min:s

(RateWatcher) Accuracy . . . . . . 1 to 99%

(Sensor) Failure Action . . . . . . . . . . PostD(e)p(osit), Stop All, Stop Matl,

TimeP(o)w(er)

CrystalTwo Tooling . . . . . . . . . . . . . . 1.0 to 999.9%

CrystalSix (XtalSix) and Crystal12 (Xtal12) sensor selections to specify a subset of
available crystal positions:

Xtal Position First . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)

Xtal Position Last . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)

(Crystal) Quality Percent . . . . . . . . . 0 to 99%

(Crystal) Quality Counts . . . . . . . . . . 0 to 99

(Crystal) Stability Single . . . . . . . . . . 0 to 9999 Hz

(Crystal) Stability Total . . . . . . . . . . . 0 to 9999 Hz

Recorder Output. . . . . . . . . . . . . . . . 0 to 12

Recorder Function . . . . . . . . . . . . . . Rate, Thick(ness), RateDev(iation), Power

Recorder Range. . . . . . . . . . . . . . . . 0 to 99999

Final Thick(ness) . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ

Thick(ness) Limit . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ

Cruc(ible) . . . . . . . . . . . . . . . . . . . . . 1 to 64